Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.
Material type:
TextSeries: Springer series in electrophysics ; v. 11Publication details: Berlin ; New York : Springer-Verlag, 1983Description: x, 556 p. : ill. ; 24 cmISBN: 0387124918 (U.S.)Subject(s): Ion implantation -- Congresses | Semiconductor doping -- Congresses | EngineeringDDC classification: 621.3815 ION LOC classification: TK7871.85 | .I5864 1983
| Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode |
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Main Library
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NFIC | 621.3815 ION (Browse shelf (Opens below)) | 1 | Available | 21621 |
Includes bibliographical references and index.
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