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Ion implantation :

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig. - Berlin ; New York : Springer-Verlag, 1983. - x, 556 p. : ill. ; 24 cm. - Springer series in electrophysics ; v. 11 .

Includes bibliographical references and index.

ISBN: 0387124918 (U.S.)

LCCN: 83006689

Subjects--Topical Terms:
Ion implantation--Congresses.
Semiconductor doping--Congresses.

Index Terms--Curriculum Objective:
Engineering

LC Class. No.: TK7871.85 / .I5864 1983

Dewey Class. No.: 621.3815 ION

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