| 000 | 01012cam a22002894a 4500 | ||
|---|---|---|---|
| 001 | 12510004 | ||
| 005 | 20170822174844.0 | ||
| 008 | 010822s2002 maua b 001 0 eng | ||
| 010 | _a 2001044737 | ||
| 020 | _a0072393912 (alk. paper) | ||
| 040 |
_aDLC _cBSU _dBSU |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7874 _b.H794 2002 |
| 082 | 0 | 0 |
_a621.381 HSU _222 |
| 100 | 1 |
_aHsu, Tai-Ran. _910841 |
|
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cTai-Ran Hsu. |
| 260 |
_aBoston : _bMcGraw-Hill, _cc2002. |
||
| 300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references (p. 427-431) and index. | ||
| 650 | 0 |
_aMicroelectronics. _910842 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _910843 |
|
| 650 | 0 |
_aMicroelectronic packaging. _910844 |
|
| 658 | _aEngineering | ||
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/mh021/2001044737.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html |
| 942 |
_2ddc _cBK |
||
| 999 |
_c5136 _d5136 |
||