TY  - BOOK
AU  - Ryssel,Heiner
AU  - Glawischnig,H.
ED  - International Conference on Ion Implantation: Equipment and Techniques
TI  - Ion implantation: equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 
SN  - 0387124918 (U.S.)
AV  - TK7871.85 .I5864 1983
U1  - 621.3815 ION 22
PY  - 1983///
CY  - Berlin, New York
PB  - Springer-Verlag
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductor doping
KW  - Engineering
N1  - Includes bibliographical references and index
ER  -