MEMS and microsystems : design and manufacture / Tai-Ran Hsu.
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TextPublication details: Boston : McGraw-Hill, c2002Description: xii, 436 p. : ill. ; 24 cmISBN: 0072393912 (alk. paper)Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packaging | EngineeringDDC classification: 621.381 HSU LOC classification: TK7874 | .H794 2002Online resources: Publisher description | Table of contents
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| 621.381 HEA Heat transfer, 1986 : | 621.381 HSU MEMS and microsystems : | 621.381 HSU MEMS and microsystems : | 621.381 HSU MEMS and microsystems : | 621.381 HSU MEMS and microsystems : | 621.381 HSU MEMS and microsystems : | 621.381 MIC Microsystem components handbook. |
Includes bibliographical references (p. 427-431) and index.
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